28th Summer School and International Symposium on the Physics of Ionized Gases S P I G 2016: MASS SPECTRA ANALYSIS OF RF NITROGEN PLASMA FOR FUNCTIONALIZATION OF CARBON NANOSTRUCTURES

Shahzad Hussain, Ilija Stefanović, Vladimir Stojanović, Jasmina Jovanović, Cedric Pattyn, Eva Kovačević, Johannes Berndt

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Low pressure (0.1 - 0.2 mbar) capacitively-coupled RF nitrogen plasma is used for plasma functionalization of carbon nanotubes. To optimize the functionalization, the samples are exposed at different distances (0 - 93 mm) from plasma source. To analyze the active species, the mass spectrometry is done at same positions. On short distances the majority of ion flux consists of N2+ ions. However, the large flux of N2H+ , H2O+ and H3O+ is detected too, which originate from relatively small amount of impurities. The possible ion-molecule reactions responsible for the detected ion fluxes are analyzed.
Original languageEnglish
Title of host publicationMASS SPECTRA ANALYSIS OF RF NITROGEN PLASMA FOR FUNCTIONALIZATION OF CARBON NANOSTRUCTURES
EditorsDragana Marić, Aleksandar Milosavljević, Bratislav Obradović, Goran Poparić
Pages272-275
Number of pages3
ISBN (Electronic) 978-86-84539-14-6
Publication statusPublished - 29 Aug 2016

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