Effect of substrate bias voltage and substrate on the structural properties of amorphous carbon films deposited by unbalanced magnetron sputtering

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effect of substrate bias voltage and substrate on the structural properties of amorphous carbon films deposited by unbalanced magnetron sputtering'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemistry

Physics & Astronomy