Keyphrases
Carbon Film
100%
RF Plasma
100%
Nitrogen Doping
100%
Diamond-like Carbon
100%
Bombardment
100%
Nitrogen Atom
100%
Low Energy
40%
Amorphous Carbon Film
20%
Plasma-enhanced Chemical Vapor Deposition (PECVD)
20%
X-ray Photoelectron Spectroscopy
20%
Raman Spectroscopy
20%
Field Emission Properties
20%
Nitrogen Plasma
20%
Work Function
20%
Nitrogen-doping Level
20%
Nitrogen Flux
20%
Density Functional Theory
20%
First-principles Calculations
20%
Processing Route
20%
Plasma Sources
20%
Material Science
Surface
100%
Carbon Films
100%
Amorphous Material
100%
Density
50%
Amorphous Carbon
25%
Plasma-Enhanced Chemical Vapor Deposition
25%
X-Ray Photoelectron Spectroscopy
25%
Raman Spectroscopy
25%
Residual Stress
25%
Pharmacology, Toxicology and Pharmaceutical Science
Carbon
100%
Nitrogen
100%
Doping
100%
X-Ray
14%