Patterning and conductivity enhancement of transparent electrodes for flat panel displays

P. Maguire, H. Feng, J. Molloy, S. J. Laverty, J. A. McLaughlin

    Research output: Contribution to journalConference articlepeer-review

    Abstract

    A brief overview is presented of the etching and metallization of tin oxide for flat panel display front electrodes. Surface reduction of the tin oxide is shown to be important for both processes. It is shown that self-aligned metallization of the electrode sidewall is possible and leads to 20 times reduction in the sheet resistance.

    Original languageEnglish
    Pages (from-to)11/1-11/6
    JournalIEE Colloquium (Digest)
    Issue number160
    Publication statusPublished - 1995
    EventIEE Colloquium on Materials for Displays - London, UK
    Duration: 3 Oct 19953 Oct 1995

    Bibliographical note

    Copyright:
    Copyright 2004 Elsevier Science B.V., Amsterdam. All rights reserved.

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