Surface characterisation of ultrathin diamond-like carbon coatings by low voltage SEM/EDX analysis

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Abstract

The intensity of EDX peaks fi-om substrate elements is used to measure the thickness of ultrathin DLC films. It also provide an electron energy loss estimate useful for optimising secondary electron images.
Original languageEnglish
Title of host publicationUnknown Host Publication
EditorsJM Rodenburg
Place of PublicationTECHNO HOUSE, REDCLIFFE WAY, BRISTOL, ENGLAND BS1 6NX
PublisherInstitute of Physics
Pages585-588
Number of pages4
Publication statusPublished - 1997
EventELECTRON MICROSCOPY AND ANALYSIS 1997 -
Duration: 1 Jan 1997 → …

Publication series

NameINSTITUTE OF PHYSICS CONFERENCE SERIES
PublisherIOP PUBLISHING LTD

Conference

ConferenceELECTRON MICROSCOPY AND ANALYSIS 1997
Period1/01/97 → …

Bibliographical note

1997 Biennial Meeting of the Electron-Microscopy-and-Analysis-Group of the Institute-of-Physics (EMAG 97), CAMBRIDGE, ENGLAND, SEP 02-05, 1997

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